| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner that can be prevented from vibrating in the pitching direction due to the raised gravity center of the laminated structure of a slider and a six-axis finely driving section. SOLUTION: The aligner repetitively exposes a substrate to a pattern plotted on the surface of an original plate by moving both the original plate and substrate or the substrate only relatively to a projection optical system by means of a stage system, while the pattern is projected upon the substrate through the projection optical system. In this aligner, an electromagnetic element driving means which movably drives electromagnetic element in an X-Y plane is installed to a substrate stage or original plate stage moving section. In addition, a yoke extended perpendicularly to a coil core used for the electromagnetic element driving means is bent in parallel with a stool. COPYRIGHT: (C)2005,JPO&NCIPI |
