| 发明名称 |
POSITION DETECTOR AND ALIGNMENT DEVICE HAVING POSITION DETECTOR |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a position detector capable of detecting a position with high precision in the horizontal direction and the vertical direction without requiring a complex mechanism. <P>SOLUTION: The position detector has an interface structure of a negative dielectric and a dielectric. The interface structure detects plasmon strength for a microstructure in a plane including the interface structure or in the vicinity thereof, and detects positional relationship between the interface structure and the microstructure. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
| 申请公布号 |
JP2004335569(A) |
申请公布日期 |
2004.11.25 |
| 申请号 |
JP20030126185 |
申请日期 |
2003.05.01 |
| 申请人 |
CANON INC |
发明人 |
YAMADA TOMOHIRO;MIZUTANI NATSUHIKO |
| 分类号 |
G01B11/00;G01B11/14;G03F1/42;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):H01L21/027 |
主分类号 |
G01B11/00 |
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