| 摘要 |
PROBLEM TO BE SOLVED: To provide a suitable installation structure of vibration-free equipment capable of having the excellence in fine vibration controlling performance, at the same time, having high flexibility of the installation of the vibration-free equipment and specially applying to a clean room in a one-storied structure. SOLUTION: Concrete construction vibration-free foundations 12 extended in the one direction D<SB>1</SB>are erected on a floor 11 of a building 10 supported by a foundation at an interval to each other in the other direction D<SB>2</SB>at right angles to the one direction D<SB>1</SB>, a plurality of beams 13 are arranged in the one direction D<SB>1</SB>at an interval to each other at least in the other direction D<SB>2</SB>to erect a vibration-free board 15 having sufficient rigidity to a support of the vibration-free equipment 14 between the vibration-free foundations 12 adjacent to each other, the vibration-free equipment 14 is installed on the vibration-free board 15 and, at the same time, the floor panel 18 is installed on the vibration-free foundations 12 wherein the vibration-free board 15 is not provided and the beams 13. COPYRIGHT: (C)2005,JPO&NCIPI
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