| 摘要 |
PROBLEM TO BE SOLVED: To provide a projection encoder based on a three-lattice theory equipped with an inexpensively-manufacturable transmission lattice having high mechanical strength. SOLUTION: This projection linear encoder 1 has an SOQ substrate 5 where the transmission lattice 3 and a lattice-shaped photodiode group 4 are formed, and a reflecting lattice board 7 where a facing reflecting lattice 6 is formed. A shielding film 3a comprising a metal thin plate or the like is formed on the surface of a glass substrate 9 on the SOQ substrate 5, and the transmission lattice 3 is formed by patterning the film. The photodiodes 4 are formed by an epitaxial growth method in a silicon layer 9 on the SOQ substrate 5. Hereby, the transmission lattice 3 having high mechanical strength can be manufactured more inexpensively than the case wherein the transmission lattice is manufactured by forming a through hole into a silicon substrate by etching. COPYRIGHT: (C)2005,JPO&NCIPI
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