| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring apparatus capable of performing collective measurement in a wide field of view by a simple constitution. SOLUTION: The shape measuring apparatus is provided with an irradiation means for irradiating an object to be measured 6 with slit-like light, a collimator lens 41 for forming parallel light L<SB>0</SB>from reflected light L<SB>0</SB>acquired by the reflection of irradiated light by the object to be measured 6, a beam splitter 42 for branching the parallel light L<SB>0</SB>into a plurality and superposing them, a plurality of mirrors 43A and 43B arranged in such a way that at least any of them is inclined to the optical axes of the branched lights L<SB>1</SB>and L<SB>2</SB>, an image forming lens 44 onto which the plurality of lights L<SB>1</SB>and L<SB>2</SB>in a state shifted to each other superposed by the beam splitter 42 are made incident, and an imaging means 5 for imaging the object to be measured 6 from a plurality of converging lights in a shifted state which are made incident and form an image in an imaging plane 51. COPYRIGHT: (C)2005,JPO&NCIPI
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