FERROELECTRIC FILM AND ITS PRODUCING PROCESS, FERROELECTRIC CAPACITOR AND FERROELECTRIC MEMORY

摘要

PROBLEM TO BE SOLVED: To provide a process for producing a ferroelectric film having hysteresis characteristics of good rectangularity, and to provide a ferroelectric film. SOLUTION: The process for producing a ferroelectric film comprises a first heat treatment step for forming a crystal nucleus in a ferroelectric material film, and a second heat treatment step for crystallizing the ferroelectric material film. COPYRIGHT: (C)2005,JPO&NCIPI