| 摘要 |
PROBLEM TO BE SOLVED: To provide a fixed abrasive grain polishing material for allowing highly accurate polishing, and hardly sticking abrasive grains to a polishing object surface even after polishing. SOLUTION: This fixed abrasive grain polishing material comprises a base material, and a polishing layer formed on a surface of the base material, and including the abrasive grain. The abrasive grains in the polishing layer includes substantially true-spherical oxide particles having low surface activity. The oxide particle having the low surface activity is small in affinity with the polishing object surface. Thus, the abrasive grain hardly sticks and remains on the polishing object surface even after the polishing. COPYRIGHT: (C)2005,JPO&NCIPI
|
