MEMS DEVICE COMPRISING AN ACTUATOR GENERATING A HYSTERESIS DRIVING MOTION

摘要

The invention relates to a self-assembling device formed by engraving in a block of a semi-conductive material, said engraving being carried out in a thickness higher than 10 mu m. The inventive device comprises the following elements: a driving element (250) sequentially meshing with a toothed driven element (10), an actuator (20) displacing the driving element according to a hysteresis motion in such a way that said driving element (250) meshes with the successive teeth (11, 12, 13) of the driving element (10). The actuator (20) comprises an actuating module (201,202) consisting of at least one fixed comb (225, 226) and a movable comb (235, 236), each comb being provided with a series of fingers. Said movable comb (235, 236) is arranged with respect to the fixed comb (225, 226) in such a way that the fingers thereof and the fingers of the movable comb interlock between each other. Said invention is characterised in that the movable comb (235, 236) is displaceable with respect to the fixed comb (225, 226) in a parallel direction to the fingers thereof when a potential difference is applied between the fixed comb and the movable comb, thereby displacing the driving element (250) in a corresponding direction.