| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a functional element capable of forming a flat functional part in a good manufacturing efficiency by using a discharging method like an ink-jet method. <P>SOLUTION: The manufacturing method of the functional element has a functional layer forming process dropping a functional layer forming liquid containing a solvent on a functional layer forming area on a substrate where the functional layer is to be formed by a discharging method, and drying and solidifying the layer afterwards. Temperature of the functional layer forming liquid after dropping is controlled so as to satisfy Tmax/Tmin≤2, wherein, Tmax is a maximum thickness of the layer in the functional area of the effective area used as the functional part of the functional element, and Tmin is a minimum thickness thereof. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
