| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To shorten the manufacturing by lots, having high manufacturing priority, and to prevent production efficiency from lowering. <P>SOLUTION: The semiconductor manufacturing equipment comprises a plurality of manufacturing devices 2 for receiving and processing wafers in each lot, a plurality of stockers 3 for storing respective lots, a carrying device 4 for carrying each lot, and a host computer 5 for controlling these devices. For the host computer 5, the higher the manufacturing priority of the lot to be transported is, the farther away can it be transported directly up to a device 2, located farther away from the devices 2 of the transport source; selects one of this directly transportable device 2 as the device 2 of the transport destination; and controls the device 4 so that the lot is transported directly from the device 2 of the transport source to the device 2 of the transport destination. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
