发明名称 MULTI-HEIGHT FINFETS
摘要 The present invention provides a FinFET device that has a first fin and a second fin. Each fin has a channel region and source and drain regions that extend from the channel region. The fins have different heights. The invention has a gate conductor positioned adjacent the fins. The gate conductor runs perpendicular to the fins and crosses the channel region of each of the first fin and second fin. The fins are parallel to one another. The ratio of the height of the first fin to the height of the second fin comprises a ratio of one to 2/3. The ratio is used to tune the performance of the transistor and determines the total channel width of the transistor.
申请公布号 WO2004100290(A2) 申请公布日期 2004.11.18
申请号 WO2004US02647 申请日期 2004.01.30
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION;RAINEY, BETH, ANN;NOWAK, EDWARD, J.;ALLER, INGO, DR.;KEINERT, JOACHIM;LUDWIG, THOMAS 发明人 RAINEY, BETH, ANN;NOWAK, EDWARD, J.;ALLER, INGO, DR.;KEINERT, JOACHIM;LUDWIG, THOMAS
分类号 H01L21/336;H01L21/84;H01L27/12;H01L29/04;H01L29/786 主分类号 H01L21/336
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