METHOD FOR PREPARING CONSTITUTION ELEMENT, PREPARED CONSTITUTION ELEMENT, LITHOGRAPHY APPARATUS AND METHOD FOR FABRICATING DEVICE TO GREATLY REDUCE OUTGASSING OF WATER OR CARBON HYDROGEN WHEN CONSTITUTION ELEMENT IS PLACED IN VACUUM SURROUNDINGS

摘要

PURPOSE: A method for preparing constitution element is provided to greatly reduce outgassing of water or carbon hydrogen when a constitution element is placed in vacuum surroundings by making the constitution element coated with a non-plastic material and by hardening the coated material. CONSTITUTION: The surface of the constitution element is coated with a non-metallic material. The non-metallic material can be a non-plastic material. The non-metallic material can be glass or a glass-like material. The non-metallic material is silica glass. The non-metallic material can be hydrogen HSQ(silsesquioxane) or an HSQ precursor to which at least one hydrogen carbon group is attached.