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发明名称
摘要
申请公布号	JP3590353(B2)	申请公布日期	2004.11.17
申请号	JP20000576483	申请日期	1999.09.21
申请人		发明人
分类号	H01B3/12;H01L21/314;H01L21/316;H01L21/8242;H01L21/8246;H01L27/105;(IPC1-7):H01L21/316	主分类号	H01B3/12
代理机构		代理人
主权项
地址

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