SUBSTRATE CASSETTE

摘要

The present invention relates to a substrate cassette. The substrate cassette comprises: a frame; a substrate holder which has multiple first support parts protruding from the inner wall of the frame to support the edge of a substrate and multiple second support parts for supporting the center area of the substrate; and a height adjusting unit which moves the second support parts in a vertical direction. Therefore, the present invention stores the substrate therein while maintaining the curved state of the substrate.