OPTICAL DEVICE AND FABRICATING METHOD THEREOF, CAPABLE OF OPTICAL LOSS OF PASSIVE WAVEGUIDE

摘要

PURPOSE: An optical device and a fabricating method thereof are provided to reduce the optical loss of a passive waveguide by forming an undoped cladding layer on a passive waveguide region. CONSTITUTION: An active mesa pattern(120) is formed on an active waveguide region of a substrate. A passive mesa pattern(122) is formed on a passive waveguide region of the substrate. A first undoped cladding layer(124), an N-type cladding layer(126), and a first P-type cladding layer(128) are sequentially formed on the entire structure. The first P-type cladding layer, the N-type cladding layer, and the first undoped cladding layer are removed from the active waveguide region by performing a pattering process. A second P-type cladding layer(130) is formed on the entire structure. An ohmic contact layer(132) is formed on the second P-type cladding layer.