| 摘要 |
PURPOSE: An apparatus for manufacturing an LCD(Liquid Crystal Display) is provided to improve productivity of LCD, quality and uniformity of thin films. CONSTITUTION: An apparatus for manufacturing an LCD includes a pre-heating unit(42), a plasma deposition unit(43), a plasma processing unit(44), and a conveying unit(45). The pre-heating unit heats a substrate higher than a predetermined temperature preliminarily. The plasma deposition unit forms a thin film on the heated substrate using reactive gases. The plasma processing unit carries out heat treatment to the thin film. The conveying unit conveys the substrate to the pre-heating unit, plasma deposition unit and plasma processing unit in an in-line manner.
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