METHOD FOR FABRICATING POLYMER OPTICAL DEVICE, CAPABLE OF MINIMIZING TEMPERATURE DEPENDENCE OF THE POLYMER OPTICAL DEVICE

摘要

PURPOSE: A method for fabricating a polymer optical fiber is provided to form a polymer AWG(Arrayed Waveguide Grating) regardless of temperature by offsetting temperature dependence. CONSTITUTION: A lower cladding layer(102) is formed by coating a polymer material on a semiconductor substrate(100). A core layer(106a) is formed by coating the polymer material on the lower cladding layer and patterning the polymer layer. An upper cladding layer(110) is formed by coating the polymer material on the resultant layer. An overlayer is formed by coating the polymer material having a predetermined thermal expansion coefficient when the lower cladding layer is separated from the upper cladding layer. The lower cladding layer is separated partially from the semiconductor substrate.