| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sealing method of an electrimechanical device for forming a pressure environment adding predetermined mechanical damping to a micro structure used in an electromechanical system. <P>SOLUTION: A sacrifice layer 30 is deposited on at least a part of a mechanical structure, and a first sealing layer 26a is deposited on the sacrifice layer 30. The sacrifice layer 30 penetrates the sealing layer 26a so as to expose at least a part of the sacrifice layer 30 and form at least one vent 32, and then, the part of the sacrifice layer is removed to form a chamber 22. Finally, after leading stable gas into the chamber, a second sealing layer is deposited on or in the vent to seal the chamber. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
