PLASMA PROCESSING DEVICE AND BAFFLE PLATE THEREOF,申请号KR20047014981-传众专利搜索

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发明名称	PLASMA PROCESSING DEVICE AND BAFFLE PLATE THEREOF
摘要
申请公布号	KR20040094846(A)	申请公布日期	2004.11.10
申请号	KR20047014981	申请日期	2003.03.28
申请人		发明人
分类号	H01L21/3065;H05H1/46;B01J19/08;C23C16/455;C23C16/50;H01J37/32;H01L21/205	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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