| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor for which the succeeding time of reverberation is short in spite of a change in peripheral temperature and the sensitivity of a detection element is proper. SOLUTION: The gas sensor 10 is equipped with a measurement chamber 28, in which a gas GS flows and a detection element body 40 which faces the measurement chamber 28. The detection element body 40 is equipped with an element case 42, having a protective film 48 bonded to the bottom surface thereof. An almost columnar sound matching plate 50 and a piezoelectric element 51 are housed in the element case 42, and a cylindrical body 52 is housed in the element case 42, at a position surrounding the sound matching plate 50 and the piezoelectric element 51. The cylindrical body 52 is installed, in a state of being spaced apart from the outer peripheries of both the piezoelectric element 51 and the sound-matching plate 50 so as not to be brought into contact with their outer peripheries. After these are housed, by filling the element case 42 with a filler, the acoustically matched plate 50, the piezoelectric element 51 and the cylindrical body 52 are sealed with a filling layer 99. COPYRIGHT: (C)2005,JPO&NCIPI
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