| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-probe and a microprocessing method using it, able to be applied as it is to a scan type probe microscope, performing high-accuracy nano-processing for an arbitrary position in a wide range collectively, and directly measuring the surface shape of a workpiece after processing. SOLUTION: A plurality of processing probes 2 having a tip 21 for processing a sample are arranged side by side on the side of a probe 1 for measuring very fine projecting and recessed parts on the surface of the sample. In a sample stage chamber of the scan type probe microscope, the processing probes 2 having the tip 21 for processing a sample are integrally fitted to the side of the sample surface measuring probe 1, the probes 1, 2 are scanned in the directions of X, Y and Z axes to the sample, an electric current is applied to the processing probes 2 to perform microprocessing for the sample, and concurrently the processing surface is measured by the measuring probe 1. COPYRIGHT: (C)2005,JPO&NCIPI
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