| 摘要 |
<p>An elastic boundary wave device ensuring good resonance characteristics and filter characteristics by effectively suppressing a spurious state caused by an elastic wave confined between a boundary surface on which an elastic boundary wave propagates and the surface of a medium layer. On the boundary between a first medium layer, i.e. an LiNbO3 substrate, having a relatively high sound velocity and a second medium layer, i.e. an SiO2 film, having a relatively low sound velocity, an IDT as an electroacoustic transducer and a reflector are arranged, and recesses and/or protrusions are provided on the upper surface of the SiO2 film by forming a plurality of grooves, thereby completing an elastic boundary wave device.</p> |
