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发明名称
摘要
申请公布号	JP3584219(B2)	申请公布日期	2004.11.04
申请号	JP20010196514	申请日期	2001.06.28
申请人		发明人
分类号	G01R1/073;H01L21/66;(IPC1-7):G01R1/073	主分类号	G01R1/073
代理机构		代理人
主权项
地址

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