| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard coating, improving the high-temperature oxidation resisting characteristic, adhesion, and wear resistance of (AlCr)N series coating, and having high hardness. SOLUTION: This hard coating is formed by arc discharge ion plating method. The hard coating is represented by (AlxCrl-x-y-zSiyMz)(N1-α-β-γBαCβOγ). The hard coating has a diffraction strength on rock salt structure type (200) face by X-ray diffraction, half-power band width thereof is from 0.5°to 2.0°both inclusive, and the hard coating has binding energy of at least Al, Cr, M and/or Si and oxygen in the region of 525eV to 535eV in X-ray photoelectron spectral analysis. The reference signs, x, y, z,α,β,γrespectively designate atomic percentage. 0.45<x<0.85, 0≤y<0.35, 0.50≤x+y+z<1.0, 0<z<0.20, 0≤α<0.15, 0≤β<0.65, 0<γ<0.65, 0<α+β+γ≤1.0, and M is selected from one or two or more kinds of elements among Ca, Mn, Sr, Y, Zr, Ce, Nd, Sm, Tb, Dy, Er and Yb. COPYRIGHT: (C)2005,JPO&NCIPI
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