发明名称 |
PROBE FOR AN OPTICAL NEAR FIELD MICROSCOPE AND METHOD FOR PRODUCING THE SAME |
摘要 |
The invention relates to a probe for an optical near field microscope, said probe comprising a tip which is formed on a self-contained carrier, and to a method for producing the same. The aim of the invention is to provide a probe for an optical near field microscope and a method for the production thereof, whereby the probe has a tip with a very small aperture diameter and can thus be produced in a reproducible manner, according to a simple, advantageously controllable method. To this end, the inventive probe is characterised in that the probe tip is embodied as a complete structure which is applied to a planar surface of the carrier, and the inventive method comprises the following steps: a transparent layer is applied to a substrate, the thickness of the transparent layer corresponding to at least the height of the probe tip; the transparent layer is masked in at least one region of the probe tip; and the transparent layer is etched, forming the probe tip. |
申请公布号 |
WO2004068501(A3) |
申请公布日期 |
2004.11.04 |
申请号 |
WO2003EP14555 |
申请日期 |
2003.12.18 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.;BRANDENBURG, ALBRECHT;KUENZEL, CHRISTA;EBERHARD, DIETMAR |
发明人 |
BRANDENBURG, ALBRECHT;KUENZEL, CHRISTA;EBERHARD, DIETMAR |
分类号 |
B81B1/00;B81B3/00;G01Q60/22 |
主分类号 |
B81B1/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|