发明名称 Method of preparing oxide crystal film/substrate composite and solution for use therein
摘要 There is provided a process for preparing a composite material of an oxide crystal film and a substrate by forming a Y123 type oxide crystal film from a solution phase on a substrate using a liquid phase method, wherein problems such as cracking of the oxide crystal film, separation of the oxide crystal film from the substrate, and development of a reaction layer between the substrate and the solution can be minimized. The solvent for forming the solution phase uses either a BaO-CuO-BaF2 system or a BaO-CuO-Ag-BaF2 system, and when the substrate with a seed crystal film bonded to the surface is brought in contact with the solution to form (grow) the oxide crystal film on the substrate, the temperature of the solution is controlled to a temperature of no more than 850° C.
申请公布号 US2004214450(A1) 申请公布日期 2004.10.28
申请号 US20040478063 申请日期 2004.06.07
申请人 SUGA TOSHIHIRO;YAMADA YASUJI;MAEDA TOSHIHIKO;KIM SEOK BEOM;KUROSAKI HARUHIKO;YAMADA YUTAKA;HIRABAYASHI IZUMI;IIJIMA YASUHIRO;WATANABE TOMONORI;YOSHINO HISASHI;MURANAKA KOJI 发明人 SUGA TOSHIHIRO;YAMADA YASUJI;MAEDA TOSHIHIKO;KIM SEOK BEOM;KUROSAKI HARUHIKO;YAMADA YUTAKA;HIRABAYASHI IZUMI;IIJIMA YASUHIRO;WATANABE TOMONORI;YOSHINO HISASHI;MURANAKA KOJI
分类号 C30B19/02;(IPC1-7):H01L21/31;H01L21/469 主分类号 C30B19/02
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