| 摘要 |
PROBLEM TO BE SOLVED: To provide an irradiation unit of a flush lamp which can irradiate very short light without applying heat damage to an object to be irradiated, by using a flush lamp whose running cost is very low as compared with a laser annealer. SOLUTION: In the irradiation unit 10 of a flush lamp which performs optical treatment of a thin film by short-time photoirradiation, a shutter 4 is installed between the flush lamp 2 and the object 8 to be irradiated. COPYRIGHT: (C)2005,JPO&NCIPI
|
