发明名称 |
IMPROVED SIMULTANEOUS MULTI-SPOT INSPECTION AND IMAGING |
摘要 |
A multi-spot inspection system employs an objective (30) for focusing an array of radiation beams (24) to a surface of an object (28) and a second objective (32) having a large numerical aperture for collecting scattered radiation (64) from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel (34) so that information about a scattering may be conveyed to a corresponding detector in a remote detector array (36) for processing. For patterned surface inspection, a cross-shaped filter (90) is rotated along with the surface to reduce the effects of diffraction by Manhattan geometry. A spatial filter (92) in the shape of an annular aperture may also be employed to reduce scattering from patterns such as arrays on the surface. |
申请公布号 |
WO03089872(A3) |
申请公布日期 |
2004.10.21 |
申请号 |
WO2003US12070 |
申请日期 |
2003.04.18 |
申请人 |
KLA-TENCOR TECHNOLOGIES CORPORATION |
发明人 |
VAEZ-IRAVANI, MEHDI;MILLER, LARRY |
分类号 |
G01N21/88;G01N21/956 |
主分类号 |
G01N21/88 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|