| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate laminating apparatus having its excellent productivity/reliability wherein two substrates are held while positioning them accurately, and they can be laminated each other quickly without causing any positional discrepancy. SOLUTION: A substrate holder 6 comprises an annular member having an opening portion 7 wherethrough substrates 4a, 4b and a laminating plate 3 can be passed, and first and second supporting portions 8, 9 for holding thereby the substrates 4a, 4b are attached to the annular member along the inner peripheral edge of the opening portion 7. Also, a phase-matching guide 11 corresponding to the notches of the substrates 4a, 4b is provided in the substrate holder 6. Further, center aligning guides 10 for centering thereby the substrates 4a, 4b are provided in the substrate holder 6. COPYRIGHT: (C)2005,JPO&NCIPI
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