FILM FORMING METHOD FILM FORMING APPARATUS, ARRANGEMENT METHOD AND APPARATUS FOR LIQUID CRYSTAL LIQUID CRYSTAL APPARATUS AND MANUFACTURING METHOD FOR THE SAME, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a film forming method and a film forming apparatus, by which a uniform coating film can be formed on a substrate aiming at reducing dropping marks. SOLUTION: The film forming apparatus 10 discharges a liquid material as a drop, and the drop impacts on the substrate 20 at a predetermined pitch P1 to form a coating film on the substrate 20. The predetermined pitch P1 is decided based on the diameter L1 after the impact of the drop on the substrate 20. COPYRIGHT: (C)2005,JPO&NCIPI