| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface emitting laser by which stable transverse mode control is performed up to a high output by suppressing heat generation. SOLUTION: The surface emitting laser which emits a laser beam perpendicularly to a growth layer includes a substrate having a takeoff of the beam, a first distributed reflector layer formed on the substrate, an active layer which is sandwiched from above and from below by a first and a second spacer layers and is formed on the first distributed reflector layer, a selectively oxidized layer which is formed on the upper first spacer layer and of which peripheral area is selectively oxidized, a tunnel junction layer in which a tunnel junction is formed on the selectively oxidized layer, a third spacer layer formed on the tunnel junction layer, a contact layer formed on a peripheral part of the third spacer layer, a first electrode formed on the contact layer, a second electrode formed on a part other than the takeout port of the beam, on the rear face of the substrate, and a second distributed reflector layer so that it may confront the third spacer layer via an air gap. COPYRIGHT: (C)2005,JPO&NCIPI
|
