| 摘要 |
PROBLEM TO BE SOLVED: To detect accurately defects such as a point defect, a stripe defect, a line defect, a stain or an irregularity defect, respectively, to detect not only a bright defect but also a dark defect by the defect detection, and to shorten a processing time when detecting the defects. SOLUTION: An image which is an inspection object is imaged by a CCD camera 6, and the difference from a background image 14 produced beforehand is taken from the image taken by imaging, and an inspection image 15 is produced. Six detection processings for detecting each of the point defect, the stain defect, the stripe defect, the irregularity defect, the line defect and a pixel irregularity defect from the inspection image 15 are performed, and brightness statistical data based on the brightness value of each pixel in the image 17 after each defect detection processing are calculated respectively. A threshold of the brightness value is set based on the brightness statistical data, and a defect candidate is extracted from the brightness statistical data and the threshold. COPYRIGHT: (C)2005,JPO&NCIPI
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