| 摘要 |
PROBLEM TO BE SOLVED: To improve displacement detection accuracy of a movable detection object 1 with a simple constitution. SOLUTION: A displacement detection means for detecting displacement of the movable detection object 1 by using detection signals outputted respectively from a pair of detection coils 2, 3 based on a magnetic change corresponding to the displacement of the movable detection object 1 is constituted so that the displacement of the movable detection object 1 is detected based on a difference signal between each detection signal outputted respectively from the pair of detection coils 2, 3, and that additionally an excitation power source 15 is controlled so as to always keep constant the value of the sum of each signal corresponding to the displacement of the movable detection object 1, and that thereby the displacement signal of the movable detection object 1 is hardly influenced even if a temperature change is generated in a device using environment. COPYRIGHT: (C)2005,JPO&NCIPI
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