APPARATUS AND METHOD FOR DETECTING PARTICLES BY USING LIGHT IRRADIATION UNIT

摘要

PURPOSE: An apparatus and a method for detecting particles are provided to detect particles by irradiating light parallel to an upper surface of a processing target. CONSTITUTION: A light irradiation unit(110) irradiates light parallel to an upper surface of a processing target in order to detect particles from the processing target supported by a stage. A driving unit(112) generates the relative motion between the light irradiation unit and the processing target in order to scan the light irradiated from the light irradiation unit. A detection unit(130a) detects the scattered light from the irradiated light of the light irradiation unit or the particles.