| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a plurality of semiconductor lasers on the same substrate by forming compound semiconductors having good crystalline qualities and different wavelengths. SOLUTION: In this method of manufacturing semiconductor lasers, the plurality of semiconductor lasers having different light emitting wavelengths is formed on the same substrate 10. This method includes the formation of temperature distribution applying areas used for producing prescribed temperature distribution on the second surface of the substrate 10, when the substrate 10 is heated from the first surface and composed of projecting sections 20 and a heat shielding layer 30 having a lower coefficient of thermal conductivity than the substrate 10 has around the projecting sections 20. This method also includes the crystal growth of the compound semiconductors 100 on the second surface of the substrate 10 by heating the substrate 10 from the first surface by using at least the temperature distribution adding areas 20. COPYRIGHT: (C)2005,JPO&NCIPI
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