| 摘要 |
PROBLEM TO BE SOLVED: To continuously and directly detect the three-dimensional position of a slide for reducing the effects of geometric shape errors in linear axes of a machine tool and of a measuring instrument. SOLUTION: In this apparatus for detecting the three-dimensional position of the slide 14 movable along a guide 12 in axes of coordinates based on a standard 24, the standard is extended in parallel with the guide 12 of the slide 14. Two surfaces 28 and 30 in parallel with each other oppose to the standard 24 each support two-dimensional linear scales. A position measuring system 20 continuously determines the three-dimensional position of a support body 22 fixable and joinable to the slide 14. The position measuring system comprises three incremental type optical reading heads 34, 36, and 38 and one distance sensor 40. The support body 22 is arranged in the slide 14 in such a way as not to come into contact with the standard 24 when the support body is in the process of instantaneous detection over all its movement stroke. COPYRIGHT: (C)2005,JPO&NCIPI
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