发明名称 HIGH VOLTAGE TRANSISTOR FOR PREVENTING GENERATION OF SPARK IN WAFER INSPECTION PROCESS
摘要 PURPOSE: A high voltage transistor is provided to prevent generation of spark by forming an impurity region with a different material from a channel stopper on an outer surface of a channel stopper. CONSTITUTION: A second conductive type base region(20,30) and a field limiting ring(40) are formed on a first conductive type collector region(10). A first conductive type channel stopper(60) is formed on the first conductive type collector region. A first conductive type emitter region(50) is formed on the second conductive type base region. An emitter electrode(80), an EQR electrode(90), and a base electrode are formed on the base region. A passivation layer is formed thereon. A second conductive type edge impurity region and a lightly-doped region are simultaneously formed on an edge of an outer surface of the channel stopper.
申请公布号 KR100439850(B1) 申请公布日期 2004.10.14
申请号 KR19970003154 申请日期 1997.01.31
申请人 FAIRCHILD KOREA SEMICONDUCTOR LTD. 发明人 YOON, YEONG SIK
分类号 H01L21/331;(IPC1-7):H01L21/331 主分类号 H01L21/331
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