MANUFACTURING METHOD OF COLD CATHODE ELECTRON SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing technology for improving an emission property of a cold cathode electron source.

SOLUTION: An electron emission part 3 including carbon nanotubes (CNTs) 4 and carbon impurities 5 is formed on a cathode electrode 2. The CNTs 4 are exposed from the impurities 5 by irradiating the laser to the emission part 3 at a irradiation density of 0.7-8.6 MW/cm2. Thereby, the CNTs 4, which are in horizontally lying states before irradiation of the laser, are raised and an emission property of the electron source is improved.

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