发明名称 METHOD AND DEVICE FOR BONDING SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a method for bonding substrates together, with which accurate positioning of two substrates bonded together with a sealant is quickly and certainly carried out. SOLUTION: The method for bonding the substrates together is provided with bonding together of two substrates with the sealant, determining positional deviation between the two substrates of the substrates bonded together and correcting the positional deviation between the two substrates by moving at least one out of the two substrates based on a corrected distance obtained by multiplying the positional deviation by a correction coefficient. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004287424(A) 申请公布日期 2004.10.14
申请号 JP20040061061 申请日期 2004.03.04
申请人 SHIBAURA MECHATRONICS CORP 发明人 OGIMOTO SHINICHI
分类号 G02F1/13;G02F1/1339;G09F9/00;H05K3/36;(IPC1-7):G02F1/133 主分类号 G02F1/13
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