| 摘要 |
<p>An electric arc evaporation source (1) for evaporating a material for coating objects within a deposition chamber (2) in which the objects which are to be coated are placed, the said source (1) functioning as a cathode and the said chamber (2) including an element functioning as an anode, the said source comprising a support (8) of electrically conducting material for mounting an a wall of the chamber (2), an electrically insulating element (11) located between the said support (8) and the wall of he chamber (2), a body (5) comprising the material which is to be evaporated placed on the said support (8) and electrically and mechanically connected thereto, a rod-shaped connector (7) electrically connected to the said support (8) for connecting the latter to the negative potential terminal of an electrical power source, and at least one magnetic field generator (6) generating a flow which is coaxial with the said rod-shaped connector (7), the said rod-shaped connector (7) being made of ferromagnetic material.</p> |
