| 摘要 |
PROBLEM TO BE SOLVED: To maintain the pressure in a treatment vessel within a specified pressure range by adjusting the pressure easily and surely without depending on temperature control, and to improve the treatment performance. SOLUTION: Treatment vessels 30A, 30B in which treatment of a wafer W is performed, a steam generator 41 for supplying steam to the vessels 30A, 30B, main feed conduits 40 (40A, 40B) which connect the generator 41 with the vessels 30A, 30B, respectively, and supply switching means 60 (60A, 60B) interposed in the main feed conduits 40 (40A, 40B) are installed. Steam discharge conduits 70 (70A, 70B) are connected with a part between the supply switching means 60 (60A, 60B) in the main feed conduits 40 (40A, 40B) and the steam generator 41, or with the generator 41. A motor valve 50 is interposed in the steam discharge conduits 70 (70A, 70B). COPYRIGHT: (C)2005,JPO&NCIPI |
