METHOD FOR MANUFACTURING CAPACITOR FOR IMPROVING FATIGUE OF FERROELECTRIC FILM

摘要

PURPOSE: A method for manufacturing a capacitor is provided to improve fatigue phenomenon by implanting oxygen or ozone ions into a conductive layer on a lower electrode using plasma treatment having low energy. CONSTITUTION: A base lower electrode composed of Ir(203) and IrO2(205) is formed on a substrate(201) with a desired structure. A conductive layer(207) is formed on the base lower electrode, thereby forming a lower electrode. The surface of the conductive layer is reformed by implanting oxygen or ozone ions(208) using plasma treatment having low energy of 0.5-1.0 KeV. Then, a ferroelectric film(209) is formed on the resultant structure. An upper electrode composed of IrO2(211) and Ir(213) is formed on the ferroelectric film. The resultant structure is annealed.