CAPILLARY DRIVING APPARATUS FOR BONDING ACCURATELY WIRE TO GENERATE OSCILLATION DETECTION SIGNAL

摘要

PURPOSE: A capillary driving apparatus for bonding accurately a wire is provided to generate an oscillation detection signal according to an oscillation of an ultrasonic concentrator by inserting oscillation sensors between an external wall of a transducer holder and an ultrasonic concentrator. CONSTITUTION: A capillary driving apparatus for bonding accurately a wire includes an ultrasonic transducer for outputting an oscillation as an ultrasonic frequency according to an input oscillation signal and an ultrasonic concentrator(3a) coupled to the ultrasonic transducer and a wire bonding capillary. The capillary driving apparatus further includes a transducer holder(6) for fixing the ultrasonic transducer and the ultrasonic concentrator coupled to the ultrasonic transducer and an oscillation sensor(5) inserted between an external wall of the transducer holder and the ultrasonic concentrator.