SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus for manufacturing a semiconductor thin film at a low cost, particularly excellent in the uniformity of the film thickness and composition ratio. SOLUTION: A heat conductor is installed between a reaction vessel and a temperature regulator or between the board facing a substrate-provided board and the temperature regulator. In other cases, the thickness of the wall in the region where the reaction vessel is near the temperature regulator is adjusted or the thickness of the board facing a substrate-provided board is adjusted. By using this design, the temperature distribution inside the reaction vessel is properly controlled for the acquisition of a semiconductor thin film excellent in film thickness and in composition ratio. COPYRIGHT: (C)2005,JPO&NCIPI