发明名称 Forming structures that include a relaxed or pseudo-relaxed layer on a substrate
摘要 The invention relates to methods of forming a relaxed or pseudo-relaxed layer on a substrate, wherein the relaxed layer may be a semiconductor material. An implementation of the method includes growing an elastically stressed semiconductor material layer on a donor substrate, forming a glassy layer of a viscous material and bonding it to the stressed layer, removing a portion of the donor substrate to form a structure that includes the glassy layer, the stressed layer and a surface layer of donor substrate, and then heat treating the structure at a temperature of at least a viscosity temperature of the glassy layer to relax the stressed layer. The glassy layer can also be bonded to a receiving substrate so that the structure can be transferred thereto. Implementations also relate to structures obtained from the method.
申请公布号 US2004195656(A1) 申请公布日期 2004.10.07
申请号 US20040784016 申请日期 2004.02.20
申请人 GHYSELEN BRUNO;MAZURE CARLOS;ARENE EMMANUEL 发明人 GHYSELEN BRUNO;MAZURE CARLOS;ARENE EMMANUEL
分类号 H01L21/20;H01L21/324;H01L21/762;(IPC1-7):H01L21/00 主分类号 H01L21/20
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