| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a forming method of a solar cell element having fine irregularities where the formation of a dead layer is minimized. <P>SOLUTION: In the forming method of the cell battery element, the fine irregularities 8 and a reverse-conductivity-type semiconductor region 6 are formed at one main surface side of a first-conductivity-type semiconductor substrate 1, and then electrodes 11, 12 are formed at one main surface side and the other of the semiconductor substrate 1. Additionally, in the forming method of the solar cell element, the fine irregularities 8 are formed by using plasma, a predeposition layer set to be a diffusion source for forming the reverse-conductivity-type semiconductor region 6 is formed, and residues generated when the fine irregularities 8 are formed are removed. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
