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发明名称
VERFAHREN UND VORRICHTUNG ZUM REINIGEN VON SUBSTRATEN
摘要
申请公布号
DE50007622(D1)
申请公布日期
2004.10.07
申请号
DE20005007622
申请日期
2000.03.16
申请人
STEAG MICRO TECH GMBH
发明人
LOHMUELLER, JUERGEN
分类号
B08B3/10;H01L21/304;(IPC1-7):B08B3/10
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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