| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a beam source and a beam treatment device capable of uniformly irradiating various beams like positive ion, negative ion, neutral particles or the like on a treated object in a large ion current density and in a large diameter, and realizing a large caliber and longer life of a grid electrode. <P>SOLUTION: Provided with a means for leading in gas, a positive and negative ion plasma generating means generating a state in which the positive ion and the negative ion are mixed through plasmolyzation of gas, a positive and negative ion generating chamber generating positive and negative ion, and a plurality of grid electrodes equipped with a plurality of beam-drawing-out holes, the device draws out ion or beams neutralized from the ion through the beam-drawing-out holes fitted to the grid electrodes by accelerating the positive ion or the negative ion through impression of voltage between the plurality of electrodes. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
