| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas barrier laminated material capable of being utilized in the package of an electronic device inclusive of an organic electroluminescence element, capable of being formed into a film at low temperatures and capable of preventing the penetration of moisture, oxygen or the like from the outside without being damaged in transparency because formed densely. SOLUTION: When a silicon nitride target is used as is conventional to form a silicon oxynitride type gas barrier layer by an RF sputtering method, the gas barrier layer becomes brown if oxgen or the like is not introduced. The permeability of the gas barrier layer is enhanced by introducing oxygen but the deterioration of gas barrier properties is brought about. In order to solve this phenomenon brought about as a known fact, an N<SB>2</SB>gas is introduced in place of the charging of an oxygen gas for the purpose of enhancing permeability without deteriorating gas barrier properties. As a result, the permeability can be enhanced without bringing about the deterioration of gas barrier properties. COPYRIGHT: (C)2005,JPO&NCIPI |
