发明名称 Method for manufacturing samll crystal resonator
摘要 A crystal resonator area and side electrode shielding/formation blocks thereabout are formed on a crystal substrate through etching with both areas kept separate from each other with a gap. Vapor deposition is diagonally applied through this gap toward the side of the crystal substrate to thereby form an electrode film divided into two portions in the thickness direction of the substrate on the side.
申请公布号 US2004191944(A1) 申请公布日期 2004.09.30
申请号 US20040808485 申请日期 2004.03.25
申请人 SHIOJI AKIHIRO;YANAGISAWA TOHRU 发明人 SHIOJI AKIHIRO;YANAGISAWA TOHRU
分类号 H03H3/02;H03H9/215;(IPC1-7):H01L21/00 主分类号 H03H3/02
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